
Calibration, Maintenance, Troubleshooting and Warranty
Quick Guide to Piezo Tube Calibration
Rev. B MultiMode SPM Instruction Manual 309
Do not adjust the derating parameters for atomic-scale imaging, including:
•X fast derate
•X slow derate
•Y fast derate
•Y slow derate
• Retracted offset der
• Extended offset der
As referenced in Section 15.7.6, you must calibrate the sensitivity parameters with the Scan angle
set at both 0 degrees and at 90 degrees.
7. Complete the Z-axis calibration using a silicon calibration reference. Refer to Section 15.8
for instructions on calibrating the Z-axis.
15.10 Quick Guide to Piezo Tube Calibration
15.10.1 Linearize Scanner
This calibration is not necessary during routine maintenance.
1. Engage in Contact AFM with these settings:
• Scan size = 440V
• Scan rate = 2.44Hz
• Scan angle = 0º
2. Rotate the sample so that it is square with respect to the X-Y scan motion.
3. Adjust Orthogonality to make the scan square.
4. Adjust the Fast Mag0 to make the first (1/3) and the last (3/3) of the image have the same
spacing of pits. Typical values are ~1.0 - 2.0.
5. Adjust the Fast Arg to make the middle (2/3) of the image equal to the first (1/3) and last (3/
3) portions of the image. Typical values are ~3.0 - 4.0.
6. Adjust the Slow mag0 and Slow arg to make the slow axis linear. Follow the same procedure
as with the fast axis.
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