UNIMO Technology UDR-204 Manual de instrucciones Pagina 87
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Cantilever Preparation
Silicon Nitride Cantilever Substrates
Rev. B MultiMode SPM Instruction Manual 67/(66 Blank)
Figure 4.2e Silicon Nitride Cantilevers—Sidewall Profile Effect
Two types of silicon nitride cantilever probes are available: standard and oxide-sharpened tip
processes. The standard devices have the nitride deposited directly into the etched silicon mold pit
formed by the intersecting <111> planes, and have points that are slightly rounded with respect to
the tips produced using the oxidation sharpening process.
The oxide-sharpened silicon nitride probes have a thermally grown silicon dioxide film deposited in
the mold pit used to shape the nitride tip, prior to silicon nitride film deposition. The oxide has two
effects: it shapes the inner contours of the pyramidal pit so that there is a slight cusp formed at the
point of the pyramid, and the oxide protects the tip from excessive exposure to a long duration wet
silicon etch used to free the cantilevers from the silicon substrate. The result is a noticeably sharper
point at the end of the pyramid. Regrettably, along with the increased sharpness of the tip comes a
slight increase in double tip effect experienced with the oxide sharpened process.
65.0°
Scanning Profile
45.0°
10.0°
11˚
- NanoScope Software Version 5 1
- 004-210-000 1
- 004-210-100 1
- Ta ble of Contents 3
- List of Figures 13
- Instruments MultiMode SPM 21
- 1.1 Introduction 22
- monitor 23
- 1.2 Safety 24
- 1.2.2 Safety Requirements 25
- 1.2.3 Safety Precautions 26
- 1.3 Microscope Specifications 33
- Microscope Specifications 34
- MultiMode 37
- 2.1 Hardware 38
- 2.1.1 MultiMode SPM 39
- 2.1.2 SPM Head 40
- 2.1.3 Scanners 41
- Hardware 43
- 2.1.4 Tipholders 44
- 2.1.5 Probes 45
- Tunneling electrons 48
- 2.3 Feedback Gains 50
- 2.3.2 Proportional Gain 51
- 2.3.3 Integral Gain 52
- 2.3.4 LookAhead Gain 52
- 2.3.6 Setpoint 53
- Feedback Gains 54
- 2.4.3 User Example 59
- 2.5 Review of TappingMode AFM 63
- Review of TappingMode AFM 64
- 2.6 Terms and Abbreviations 66
- Terms and Abbreviations 67
- 3.2 Component List 69
- Component List 70
- 3.2.1 Unpack The System 71
- 3.2.2 Vibration Isolation 75
- 3.2.3 System Power Up 76
- Silicon Cantilever Substrates 78
- Scan direction = 0 deg 80
- Scan direction = 90 deg 81
- Lever Type 86
- Preparation 89
- 5.1.1 Prepare the Sample 92
- 5.1.2 Load the Sample 93
- Reattach retaining 94
- Tip down 94
- 5.1.3 Load Probe in Tipholder 95
- 5.1.4 Install the Tipholder 97
- 5.2 Laser Alignment 98
- Laser Alignment 100
- 5.2.3 Maximize the SUM Signal 103
- Start the Microscope Program 104
- MultiMode SPM Voltage Meters 105
- RMS VERT 106
- Chapter 6 Contact AFM Mode 107
- • Setpoint: Section 6.5.4 108
- 6.1.2 Signal Settings 109
- 6.1.4 Position Tip with OMV 110
- 6.2.1 Show All Items 111
- to 0.0 112
- fidence in 115
- 0.00 nm 115
- Initiate the Engage Command 116
- 6.4.1 Cantilever Selection 118
- 6.5.1 Data type 119
- 6.5.2 Gain settings 120
- 6.5.3 Scan size and Scan rate 120
- 6.5.4 Setpoint 121
- 6.5.5 Lowpass filter 121
- 6.5.6 Highpass filter 121
- Chapter 7 TappingMode AFM 123
- 7.2.1 Switch to TappingMode 125
- 7.2.2 Show All Items 125
- 7.2.3 Check Parameters 126
- Preparation Prior to Imaging 127
- TappingMode AFM 128
- 7.2.5 Additional preparations 129
- 7.2.6 Tune the Cantilever 129
- 7.3 Engaging The Microscope 133
- Engaging The Microscope 134
- 7.4 Withdrawing the Tip 135
- 50.00 nm/div 136
- Scan Size - 2.50 µm/div 136
- Chapter 8 Fluid Operation 141
- 8.1 Introduction 143
- 8.2 General Fluid Operation 143
- General Fluid Operation 144
- 8.2.2 Select the Probe 145
- 8.2.5 Sample Mounting 147
- Method 1 (with an O-ring) 147
- Method 2: Without an O-ring 149
- 8.2.6 Align the Laser 151
- 8.2.8 Engage the Surface 152
- 8.3 TappingMode in Fluids 154
- the Scan Rate to 1Hz 155
- TappingMode in Fluids 156
- 8.4 Troubleshooting Tips 158
- Troubleshooting Tips 159
- 8.6.1 Protein Binding Theory 162
- 8.7 Binding DNA to Mica 165
- 8.7.3 Acknowledgments 166
- Microscopy (STM) 167
- 9.1 STM Introduction 168
- 9.1.2 STM Hardware 169
- 9.1.3 Sample Surface 170
- 9.1.4 Vibration isolation 170
- 9.2 Basic STM Operation 171
- Basic STM Operation 172
- 9.3 Spectroscopy with the STM 173
- 9.3.2 Operation of STS 174
- 9.4 Troubleshooting for STM 175
- 9.5 Low-Current STM 176
- 9.5.2 Hardware Description 177
- 9.5.3 Precautions 177
- 9.5.4 Installation 178
- Low-Current STM 179
- 9.5.5 Operation 180
- 9.5.6 Servicing the Converter 182
- 9.6 Etching Tungsten Tips 184
- 9.6.1 Procedure 185
- Lateral Force 187
- 10.1 Basic LFM Operation 188
- 10.2 Advanced LFM Operation 189
- 10.2.2 Tip selection 190
- High Friction 191
- Low Friction 191
- Advanced LFM Operation 192
- Chapter 11 Force Imaging 195
- 11.1 Force Plots–An Analogy 197
- 11.2 Force Calibration Mode 198
- Force Calibration Mode 199
- 11.2.1 Example Force Plot 200
- Y Offset 204
- 11.3.3 Channel 1, 2, 3 Panels 206
- Total Force 208
- End Mode 209
- 11.3.6 Menu Bar Commands 210
- 11.4.2 Helpful Suggestions 212
- Deflection 213
- 0.48 V/div 213
- Z Position - 9.27 V/div 213
- Setpoint 213
- 11.4.3 Advanced Techniques 214
- 11.5.1 Force Plots 219
- • Main Controls 221
- • Channel 1 Panel 221
- 11.5.3 High Contact Force 223
- 11.5.4 Tip Selection 223
- 11.6 Force Modulation 224
- 11.6.3 Operating Principle 226
- Force Modulation 227
- 11.6.5 Notes About Artifacts 231
- 11.8 Force Volume 235
- LiftMode 237
- Interleave Mode Description 239
- 12.3 Lift Mode Description 240
- 12.5.2 Setpoint Selection 242
- Imaging 245
- Magnetic Force Imaging Theory 246
- 13.2.1 Procedure 248
- Drive Frequency 249
- Phase (deg) 249
- Amplitude 250
- 13.2.2 Frequency Modulation 252
- 13.3.1 Basic Extender 252
- 13.3.2 Quadrex Extender 253
- 13.3.3 NanoScope IV 253
- 13.5.1 MFM Image Verification 254
- 13.6 Advanced Topics 255
- Advanced Topics 256
- (Feedback loop 263
- NanoScope Controller 265
- Electric Force (EFM) Imaging 267
- External Voltage 269
- Source 269
- NanoScope 276
- 14.4.1 Phase Detection 277
- 14.4.2 Amplitude Detection 279
- Microscope 285
- Troubleshooting and Warranty 291
- Section 15.8.6 292
- 15.1 SPM Calibration Overview 295
- SPM Calibration Overview 297
- 15.1.2 Calibration References 300
- 15.2 Calibration Setup 301
- 15.3.1 Measure Orthogonality 303
- 15.4.1 Adjust Mag0 and Arg 304
- Mag0 Too Large Mag0 Too Small 305
- Arg Too LargeArg Too Small 306
- 15.4.2 Adjusting Fast Mag1 307
- 15.4.3 Adjust Slow Mag1 308
- Autocalibration 309
- SKIP to 310
- 28.37 µµ 311
- 15.6 Autocalibration 312
- Draw a horizontal line 315
- 15.8 Calibrating Z 319
- Calibrating Z 320
- 15.8.4 Correct Z Sensitivity 323
- Scope mode 325
- Measurement 326
- • Extended offset der 329
- Section 15.8.6) 331
- 15. Recheck accuracy at 0V 331
- 15.11.1 False engagement 333
- 15.11.3 Head does not engage 334
- 15.11.6 Lines in the image 335
- Contact AFM Troubleshooting 336
- 15.11.10 Poor image quality 337
- 15.11.14 Image goes white 338
- With Streaks Without Streaks 340
- With Rings Without Rings 341
- 15.13.1 Image drifts 343
- 15.13.2 Leaks 344
- 15.14.1 Inspection 344
- 15.14.4 Clean Guide Bushings 347
- 15.14.5 Lubricate 347
- 15.14.6 Reinstall 347
- 15.16.1 Hardware Installation 350
- 15.16.2 Select scanner 351
- 15.16.3 Inspect scanner 351
- 15.18 Warranty 353
- Warranty 354
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